欣銓科技提供晶圓級晶粒尺寸封裝(Wafer Level Chip Scale Packaging)後段製程服務。包含晶片研磨/晶背貼膠/晶背打印/雷射預切/晶粒切割/自動光學檢視/並將IC直接用機台放置於Carrier tape中。
Main Process Equipment | |||||
No | Stage | Key Process Name | Brand | Model | |
1 |
BGD |
Wafer Backgrind |
Disco | DFG8560 | |
Accretech | PG3000RM | ||||
2 | WLM | Wafer Laser mark | EO | CSM3000 | |
3 | LG | Laser Grooving | Disco | DFL 7161 | |
4 | DICING | Dicing Saw | Disco | DFD 6362 | |
5 | AOI | Auto Optical Inspection | Camtek | Condor | |
103 PD | |||||
6 | TnR | Die Sorter(Tape & Reel) | STI | Isort-Maxx | |
Isort-Express | |||||
Ueno | RS-20 |